UV Optical Components
UV Optical Components

UV Optical Components

Making the most of a UV laser beam.

Attenuators

Attenuator Module, Manual

Variable attenuation substrate 60 x 35 x 2 mm3 with inverse characteristic for high thermal stability. Compensator plate 60 x 35 x 2 mm3 to compensate for any beam displacement. With manual knob and digital scale for accurate transmittance setting. Electromagnetic shutter.

Attenuator Module, Motorized

Variable attenuation substrate 60 x 35 x 2 mm3 with inverse characteristic for high thermal stability. Compensator plate 60 x 35 x 2 mm3 to compensate for any beam displacement. With DC motor and encoder, ACM RS-232 interface module, interface cables, and control software for Microsoft Windows. Electromagnetic shutter.

Attenuator Module for 157 nm

Leak-tight module housing with an observation window. Variable attenuation substrate 60 x 35 x 2 mm3 with inverse characteristic for high thermal stability. Compensator plate 60 x 35 x 2 mm3 to compensate for any beam displacement. Manual knob and digital scale for transmittance setting. Electromagnetic shutter. Flanges for tube connections and vacuum exhaust. Purge gas inlet and exhaust gas outlet with gate valve.

Features & Benefits


Specifications

Wavelength (nm) Attenuator Module, Manual (Part No.) Attenuator Module, Motorized (Part No.)
Attenuator Module for 157 nm (Part No.)
157 Not Available Not Available
1111338
193 2910218 1116186
Not Available
248 2910216 2910566
Not Available
308 1116181 1116184
Not Available
351 1116182 2910568
Not Available

Homogenizers - Superior Optics and Coatings

Because excimer lasers produce high-energy pulses of ultraviolet light, the materials used to make the optics must be carefully selected and the optics themselves must be carefully designed. You can rely on our deep knowledge and many years of experience to deliver the exact solutions you need.

Specifications

Homogenizer 5 x 5 Homogenizer 10 x 10
Homogenized Field Size (mm) 5 x 5 10 x 10
Zoom (%) ±10 ±10
Homogeneity (%) <±5 <±5
Field Position ~350 mm after homogenizer exit (depending on wavelength) ~450 mm after homogenizer exit (depending on wavelength)
Entrance Aperture (mm) 27 x 27 27 x 27
Overall Entrance - Exit Length (mm) ~650 (depending on wavelength) ~700 (depending on wavelength)
Part No. 193 nm 1385911 1385914
Part No. 248 nm 1385912 1385915
Part No. 308 nm 1385913 1385916
Part No. 351 nm 1116201 1116205


Projection Lenses

P-lens 4-10x/4-xxx P-lens 5x/18-xxx P-lens 5x/30-xxx Doublet 50-xxx
Doublet 100-xxx
Wavelength (nm) 157 157
193 193 193
248 248 248 248
308 308 308 308 308
351 351 351
Demagnification 4 to 10x (higher demagnification on request) 5x 5x Variable
Variable
Focal Length (mm) Approx. 100 Approx. 50
Approx. 100
Image Field Diameter (mm) 4 18 30 Depending on wavelength
Depending on wavelength
Numerical Aperture Depending on wavelength (diffraction-limited for all available wavelengths) 0.13 (diffraction limited) 0.1 (diffraction limited)
Spatial Resolution (µm) 3 (lines and spaces) 2 (lines and spaces) 2.5 (lines and spaces) 50 (lines and spaces) 50 (lines and spaces)
Working Distance Depending on wavelength, use of eye piece, and demagnification Depending on wavelength Depending on wavelength Approx. 35 mm Approx. 70 mm
Tracking Length Depending on wavelength, use of eye piece, and demagnification 800 mm 1050 mm Depending on wavelength and demagnification ratio Depending on wavelength and demagnification ratio
Transmission >80% >80% >80% - -
Part No. 157 nm 1116211 1116216
Part No. 193 nm 9680011 1116212 1116217
Part No. 248 nm M290009 M290022 1116213 1116218
Part No. 308 nm 1116206 1143259 1116214 2921330
Part No. 351 nm 1116215 1116219