Making the most of a UV laser beam.
Attenuator Module, Manual
Variable attenuation substrate 60 x 35 x 2 mm3 with inverse characteristic for high thermal stability. Compensator plate 60 x 35 x 2 mm3 to compensate for any beam displacement. With manual knob and digital scale for accurate transmittance setting. Electromagnetic shutter.
Attenuator Module, Motorized
Variable attenuation substrate 60 x 35 x 2 mm3 with inverse characteristic for high thermal stability. Compensator plate 60 x 35 x 2 mm3 to compensate for any beam displacement. With DC motor and encoder, ATM RS-232 interface module, interface cables, mini-controller and control software for Microsoft Windows. Electromagnetic shutter.
Attenuator Module for 157 nm
Leak-tight module housing with observation window. Variable attenuation substrate 60 x 35 x 2 mm3 with inverse characteristic for high thermal stability. Compensator plate 60 x 35 x 2 mm3 to compensate for any beam displacement. Manual knob and digital scale for transmittance setting. Electromagnetic shutter. Flanges for tube connections and vacuum exhaust. Purge gas inlet and exhaust gas outlet with gate valve.
|Wavelength (nm)||Attenuator Module, Manual (Part No.)||Attenuator Module, Motorized (Part No.)|
Attenuator Module for 157 nm (Part No.)
|157||Not Available||Not Available|
Homogenizers - Superior Optics and Coatings
Because excimer lasers produce high-energy pulses of ultraviolet light, the materials used to make the optics must be carefully selected and the optics themselves must be carefully designed. You can rely on our deep knowledge and many years of experience to deliver the exact solutions you need.
|Homogenizer 5 x 5||Homogenizer 10 x 10|
Homgenizer 20 x 20
|Homogenized Field Size (mm)||5 x 5||10 x 10|
20 x 20
|Field Position||Entrance aperture||Entrance aperture|
|Appox. 600 mm after Homogenizer Exit (depending on wavelength)||32 x 32 mm, overall size entrance-exit approx. 1100 mm (depending on wavelength)||29.6 x 29.6 mm, overall size entrance-exit approx. 1000 mm (depending on wavelength)|
29.6 x 29.6 mm, overall size entrance-exit approx. 900 mm (depending on wavelength)
|Other versions on request||Field dimensions from 4 x 4 mm up to 200 mm|
|Part No. 193 nm||1116198||1116202|
|Part No. 248 nm||1116199||1116203|
|Part No. 308 nm||1116200||1116204|
|Part No. 351 nm||1116201||1116205|
|P-lens 4-10x/4-xxx||P-lens 5x/18-xxx||P-lens 5x/30-xxx||Doublet 50-xxx|
|Demagnification||4 to 10x (higher demagnification on request)||5x||5x||Variable|
|Focal Length (mm)||Approx. 100||Approx. 50|
|Image Field Diameter (mm)||4||18||30||Depending on wavelength|
Depending on wavelength
|Numerical Aperture||Depending on wavelength (diffraction-limited for all available wavelengths)||0.13 (diffraction limited)||0.1 (diffraction limited)|
|Spatial Resolution (µm)||3 lines and spaces||2 lines and spaces||2.5 lines and spaces||50 lines and spaces||50 lines and spaces|
|Working Distance||Depending on wavelength, use of eye piece, and demagnification||Depending on wavelength||Depending on wavelength||Approx. 35 mm||Approx. 70 mm|
|Tracking Length||Depending on wavelength, use of eye piece, and demagnification||800 mm||1050 mm||Depending on wavelength and demagnification ratio||Depending on wavelength and demagnification ratio|
|Part No. 157 nm||1116211||1116216|
|Part No. 193 nm||9680011||1116198||1116212||1116217|
|Part No. 248 nm||M290009||M290022||1137121||1116213||1116218|
|Part No. 308 nm||1116206||M290008||9680052||1116214||2921330|
|Part No. 351 nm||1116207||1116201||1116215||1116219|
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Santa Clara, CA 95054 USA
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Risk factors: Except for the historical information contained here, many of the matters discussed in this Web site are forward-looking statements, based on expectations at the time they were made, that involve risks and uncertainties that could cause our results to differ materially from those expressed or implied by such statements. These risks are detailed in the “Factors That May Affect Future Results” section of our latest 10-K or 10-Q filing. Coherent assumes no obligation to update these forward-looking statements.